High Resolution Powder Blast Micromachining

نویسندگان

  • Henk Wensink
  • J. W. Berenschot
  • Henri V. Jansen
  • Miko C. Elwenspoek
چکیده

Powder blasting, or Abrasive Jet Machining (AJM), is a technique in which a particle jet is directed towards a target for mechanical material removal. It is a fast, cheap and accurate directional etch technique for brittle materials like glass, silicon and ceramics. By introducing electroplated copper as a new mask material, the feature size of this process was decreased. It was found that blasting with 9 pm particles (compared with 30 pm particles) result in a higher slope of the channel sidewall. The aspect ratio of powder blasted channels was increased by using the high resistance of the copper mask in combination with the use of 9 pm particles. Furthermore, our measurements show how the blast lag (small channels etch slower compared to wider channels) is decreased by using smaller particles.

برای دانلود متن کامل این مقاله و بیش از 32 میلیون مقاله دیگر ابتدا ثبت نام کنید

ثبت نام

اگر عضو سایت هستید لطفا وارد حساب کاربری خود شوید

منابع مشابه

Simulation of the Reactive Powder Concrete (RPC) Behavior Reinforcing with Resistant Fiber Subjected to Blast Load

In research or experimental works related to blast loads, the amount of explosion material and distance of explosion point are very important. So, in this paper has been attempted to present a parametric study of the reactive powder concrete subjected to blast load. The effect of the different amount of TNT adopted the literature, distance of explosion point from RPC slab and also the location ...

متن کامل

Laser Micromachining of Glass, Silicon and Ceramics. a Review

A brief review is focused on laser micromachining of materials. Micromachining of materials is highly widespread method used in many industries, including semiconductors, electronic, medical, automotive, communication and aerospace. This method is a promising tool for material processing with micron and submicron resolution. In this paper micromachining of glass, silicon and ceramics is conside...

متن کامل

Micromachining of AlN and Al2O3 Using Fiber Laser

We report on high precision high speed micromachining of Al2O3 and AlN using pulsed near infrared fiber laser. Ablation thresholds are determined to be 30 J/cm2 for alumina and 18 J/cm2 for aluminum nitride. The factors influencing the efficiency and quality of 3D micromachining, namely the surface roughness, the material removal rate and the ablation depth accuracy are determined as a function...

متن کامل

Ion beam micromachining of integrated optics components.

Thin film integrated optics components such as light guides, modulators, directional couplers, and polarizers demand high quality edge smoothness and high resolution pattern formation in dimensions down to submicrometer size. Fabrication techniques combining holographic and scanning electron beam lithography with ion beam micromachining have produced planar phase gratings with intervals as smal...

متن کامل

Manufacturing costs for microsystems/MEMS using high aspect ratio microfabrication techniques

The emphasis on high aspect ratio micromachining techniques for microsystems/MEMS has been mainly to achieve novel devices with, for example, high sensing or actuation performance. Often these utilize deep structures (100–1,000 lm) with vertical wall layers but with relatively modest spatial resolution (1–10 lm). As these techniques move from research to industrial manufacture, the capital cost...

متن کامل

ذخیره در منابع من


  با ذخیره ی این منبع در منابع من، دسترسی به آن را برای استفاده های بعدی آسان تر کنید

برای دانلود متن کامل این مقاله و بیش از 32 میلیون مقاله دیگر ابتدا ثبت نام کنید

ثبت نام

اگر عضو سایت هستید لطفا وارد حساب کاربری خود شوید

عنوان ژورنال:

دوره   شماره 

صفحات  -

تاریخ انتشار 2004